WALL COLLISIONS, ANGULAR FLUX, AND PUMPING REQUIREMENTS IN MOLECULAR-FLOW THROUGH TUBES AND MICROCHANNEL ARRAYS

被引：17

作者：

MURPHY, DM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 05期

关键词：

D O I：

10.1116/1.576317

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3075 / 3091

页数：17

共 20 条

[1]

Anderson S., COMMUNICATION

[2]

ANDERSON SM, 1983, THESIS U MINNESOTA

ANGEL, GC ;

GILES, RA .

JOURNAL OF PHYSICS PART B ATOMIC AND MOLECULAR PHYSICS, 1972, 5 (01) :80-&

[4] INTERNAL RAREFIED-GAS FLOWS WITH BACKSCATTERING [J].

BERMAN, AS ;

MAEGLEY, WJ .

[5]

BERMAN AS, 1985, J APPL PHYS, V36, P3356

[6]

Clausing P, 1932, ANN PHYS-BERLIN, V12, P961

[7] FLOW OF HIGHLY RAREFIED GASES THROUGH TUBES OF ARBITRARY LENGTH [J].

CLAUSING, P .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (05) :636-&

[8]

Dayton B. B, 1956, VACUUM S T, P5

[9]

DEMARCUS WC, 1957, K1032 UN CARB NUCL 3

[10] MOLECULAR BEAM FORMATION BY LONG PARALLEL TUBES [J].

GIORDMAINE, JA ;

WANG, TC .