LIFETIME OF THIN OXIDE AND OXIDE-NITRIDE-OXIDE DIELECTRICS WITHIN TRENCH CAPACITORS FOR DRAMS

被引：33

作者：

HIERGEIST, P

SPITZER, A

ROHL, S

机构：

来源：

关键词：

D O I：

10.1109/16.299673

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：913 / 919

页数：7

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