REDUCTION OF METAL-OXIDES BY ELECTRON-CYCLOTRON RESONANCE (ECR) PLASMA OF HYDROGEN - A MODEL STUDY ON DISCHARGE CLEANING

被引：16

作者：

SAKAMOTO, Y

ISHIBE, Y

机构：

来源：

关键词：

D O I：

10.1143/JJAP.19.839

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：839 / 843

页数：5

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