QUANTITATIVE AUGER-ELECTRON SPECTROSCOPY OF ALXGA1-XAS LAYERS AND SUPERSTRUCTURES GROWN BY MBE

被引:11
作者
CHEN, WD [1 ]
BENDER, H [1 ]
DEMESMAEKER, A [1 ]
VANDERVORST, W [1 ]
MAES, HE [1 ]
机构
[1] IMEC VZW,B-3030 LEUVEN,BELGIUM
关键词
D O I
10.1002/sia.740120217
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
14
引用
收藏
页码:156 / 160
页数:5
相关论文
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