MICROCOMPUTER-BASED MULTIPLEXER FOR PERFORMING DEPTH PROFILING WITH AN AUGER-ELECTRON SPECTROMETER

被引：2

作者：

OPPENHEIMER, JL

机构：

[1] University of California, Lawrence Livermore Laboratory, Livermore

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1979年 / 50卷 / 05期

关键词：

D O I：

10.1063/1.1135883

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A microcomputer-based instrument for the automated profiling of samples with an Auger electron spectrometer and Ion Gun is described. The instrument records the changing heights of spectral peaks as it controls spectrometer scanning over predefined windows. Interactive front panel controls are used to set up a run and control profiling operations. The generated data is stored on a magnetic disk for later analysis and plotting. Implementation of the device using an LSI-11 microcomputer and interfacing hardware is detailed, along with the characteristics of the fortran iv driving software. An exploration of future capabilities and applications of the multiplexer is also given.

引用

页码：572 / 576

页数：5