ION-BEAM ANALYSIS OF DIFFUSION-PROCESSES IN A TIC FILM ON WC OBTAINED BY CHEMICAL VAPOR-DEPOSITION

被引：4

作者：

RUDOLF, F ^{[1
]}

JACCARD, C ^{[1
]}

CHOLLET, L ^{[1
]}

机构：

[1] LAB SUISSE RECH HORLOGERES,CH-2000 NEUCHATEL,SWITZERLAND

来源：

关键词：

D O I：

10.1016/0040-6090(80)90243-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：331 / 337

页数：7

共 13 条

[1]

Andersen HH., 1977, HYDROGEN STOPPING PO

[2]

BORDERS JA, 1978, NUCL INSTRUM METHODS, V149, P279, DOI 10.1016/0029-554X(78)90873-X

[3]

BUHSMER CP, 1968, THESIS ALFRED U

[4]

Chu W.K, 1977, ION BEAM HDB MAT ANA, P1

[5]

HINTERMANN HE, 1972, 3RD P INT C CVD, P352

[6]

HINTERMANN HE, 1973, 4 INT C CHEM VAP DEP, P107

[7] DIFFUSION OF 44TI IN TICX [J].

SARIAN, S .

[8] DIFFUSION OF CARBON IN TIC [J].

SARIAN, S .

SCHULTE, RL .

NUCLEAR INSTRUMENTS & METHODS, 1976, 137 (02) :251-256

SHARMA, NK ;

WILLIAMS, WS ;

GOTTSCHALL, RJ .