OPTICAL CHARACTERIZATION OF TEXTURED MICROWAVE CVD DIAMOND

被引:6
作者
HAQ, S [1 ]
TUNNICLIFFE, DL [1 ]
SAVAGE, JA [1 ]
机构
[1] DRA MALVERN,MALVERN WR14 3PS,WORCS,ENGLAND
关键词
D O I
10.1016/0925-9635(94)90231-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond which exhibits strong preferred orientation in [111], [110] and [100] directions was grown in thicknesses of up to 200 mum by microwave chemical vapour deposition in an Astex reactor. Characterization by X-ray diffraction, scanning electron microscopy, Raman spectroscopy and IR transmission on both free-standing diamond and diamond on silicon substrates was performed. It was found that there is a variation in optical transmission with both the preferred orientation of the diamond and the layer thickness. The lowest CH absorptions were obtained for the [110] material followed by the [100] and then the [111] diamond. The defect-induced single-phonon absorption was highest in the [111] textured material but no significant absorption difference between the [100] and [110] textures was found. By the addition of suitable amounts of oxygen, both the CH-related and the single-phonon absorption could be reduced to undetectable levels. A decrease in CH absorption with layer thickness may be related to the poorer quality and microstructure of the diamond close to the growth interface.
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收藏
页码:593 / 597
页数:5
相关论文
共 4 条
[1]   MICROSTRUCTURE AND ORIENTATION EFFECTS IN DIAMOND THIN-FILMS [J].
DENATALE, JF ;
HARKER, AB ;
FLINTOFF, JF .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (09) :6456-6460
[2]   (110)-ORIENTED DIAMOND FILMS SYNTHESIZED BY MICROWAVE CHEMICAL-VAPOR DEPOSITION [J].
KOBASHI, K ;
NISHIMURA, K ;
MIYATA, K ;
KUMAGAI, K ;
NAKAUE, A .
JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2469-2482
[3]  
WILD C, 1991, APPL DIAMOND FILMS R, P197
[4]  
WILLINGHAM C, 1991, APPL DIAMOND FILMS R, P157