SIMS ANALYSIS OF LOW-TEMPERATURE OHMIC CONTACTS TO GAAS

被引：11

作者：

KATZ, W ^{[1
]}

SMITH, G ^{[1
]}

AINA, O ^{[1
]}

BALIGA, BJ ^{[1
]}

ROSE, K ^{[1
]}

机构：

[1] RENSSELAER POLYTECH INST,TROY,NY 12181

来源：

APPLIED SURFACE SCIENCE | 1981年 / 9卷 / 1-4期

关键词：

D O I：

10.1016/0378-5963(81)90031-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：122 / 130

页数：9

共 16 条

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[8] INFLUENCE OF ATOMIC MIXING AND PREFERENTIAL SPUTTERING ON DEPTH PROFILES AND INTERFACES [J].

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LIAU ZL, 1978, J APPL PHYS, V49, P5292

[10] ION-BEAM SPUTTERING - EFFECT OF INCIDENT ION ENERGY ON ATOMIC MIXING IN SUBSURFACE LAYERS [J].

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