OPTICAL-PROPERTIES OF DIAMOND-LIKE TRANSITIONAL FILMS PRODUCED BY DC-PLASMA DEPOSITION OF ACETYLENE

被引：7

作者：

DUTTA, D

CHATTOPADHYAY, KK

DUTTA, J

CHAUDHURI, S

PAL, AK

机构：

[1] Department of Materials Science, Indian Association for the Cultivation of Science, Calcutta

来源：

MATERIALS LETTERS | 1993年 / 18卷 / 03期

关键词：

D O I：

10.1016/0167-577X(93)90108-A

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like transitional films were produced by dc plasma deposition of a mixture of acetylene (4-10 vol%) and hydrogen. Optical properties of the films were recorded over a wide range of wavelength from the visible to IR. Films deposited on Si substrates were studied by Raman spectroscopy and IR absorption while those deposited on quartz were used to determine the band gap (1.5-2.8 eV) from transmittance studies in the visible range.

引用

页码：114 / 118

页数：5

共 17 条

[1]

ANGUS JC, 1984, THIN SOLID FILMS, V118, P311, DOI 10.1016/0040-6090(84)90202-5

[2]

BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556

[3]

CHATTOPADHYAY KK, 1993, J MATER LETT, V16, P145

[4] MECHANISM OF DIAMOND FILM GROWTH BY HOT-FILAMENT CVD - C-13 STUDIES [J].