ION-BOMBARDMENT-ENHANCED GRAIN-GROWTH IN GERMANIUM, SILICON, AND GOLD THIN-FILMS

被引:114
作者
ATWATER, HA
THOMPSON, CV
SMITH, HI
机构
[1] MIT,DEPT MAT SCI & ENGN,CAMBRIDGE,MA 02139
[2] MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
关键词
D O I
10.1063/1.341665
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:2337 / 2353
页数:17
相关论文
共 38 条
[1]   INTERFACE-LIMITED GRAIN-BOUNDARY MOTION DURING ION-BOMBARDMENT [J].
ATWATER, HA ;
THOMPSON, CV ;
SMITH, HI .
PHYSICAL REVIEW LETTERS, 1988, 60 (02) :112-115
[2]  
ATWATER HA, 1986, BEAM SOLID INTERACTI, V51, P337
[3]  
ATWATER HA, 1987, BEM SOLID INTERACTIO, V74, P499
[4]   GENERAL TREATMENT OF CONDUCTION ELECTRON REDISTRIBUTION DUE TO POINT DEFECT COMPLEXES AND LATTICE DISTORTION IN NOBLE METALS [J].
BENNEMANN, KH .
PHYSICAL REVIEW, 1963, 130 (05) :1763-&
[5]   GRAIN GROWTH IN ZONE-REFINED LEAD [J].
BOLLING, GF ;
WINEGARD, WC .
ACTA METALLURGICA, 1958, 6 (04) :283-287
[6]   GRAIN GROWTH IN FULLY DENSE ZNO [J].
DUTTA, SK ;
SPRIGGS, RM .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1970, 53 (01) :61-&
[7]   GRAIN GROWTH IN METALS [J].
FELTHAM, P .
ACTA METALLURGICA, 1957, 5 (02) :97-105
[8]  
GORDON P, 1965, T METALL SOC AIME, V233, P391
[9]   EFFECT OF SMALL AMOUNTS OF POROSITY ON GRAIN GROWTH IN HOT-PRESSED MAGNESIUM OXIDE AND MAGNESIOWUSTITE [J].
GORDON, RS ;
MARCHANT, DD ;
HOLLENBERG, GW .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1970, 53 (07) :399-+
[10]   ON THEORY OF NORMAL AND ABNORMAL GRAIN GROWTH [J].
HILLERT, M .
ACTA METALLURGICA, 1965, 13 (03) :227-&