PULSED BARRIER DISCHARGES FOR THIN-FILM PRODUCTION AT ATMOSPHERIC-PRESSURE

Barrier discharges can be generated in gas gaps between two electrodes and dielectric barriers. Barrier discharges at atmospheric pressure consist of microdischarges which can be used for surface treatment, for example to activate polymer surfaces. In this paper investigations of the distribution of microdischarges under different conditions and the influence on the discharges of parameters such as the voltage steepness and the repetition frequency of the voltage pulses are discussed. Furthermore, it is demonstrated successfully that homogeneous thin films can be produced on surfaces using reactive gases in the gap. The distribution of microdischarges is influenced by the properties of the power supply. A uniform thickness and good adhesion of film were achieved with unipolar and fast rising high voltage pulses. The process conditions for forming a uniform polymer film on glass substrates are given.