THE CHROMATIC IMAGE SHIFT IN SPATIALLY-RESOLVED EELS

被引:7
作者
SCHATTSCHNEIDER, P [1 ]
JOUFFREY, B [1 ]
TISCHLER, C [1 ]
BANGERT, H [1 ]
机构
[1] VIENNA TECH UNIV,INST ANGEW & TECH PHYS,A-1040 VIENNA,AUSTRIA
关键词
D O I
10.1016/0304-3991(94)90033-7
中图分类号
TH742 [显微镜];
学科分类号
摘要
A previously unnoticed effect that occurs in microanalysis by electron energy-loss spectrometry (EELS) in image mode has been investigated, namely the shift of the inelastic image relative to the elastic one. A method is proposed for correction of the shift in the microscope. It is shown by way of example that quantitative microanalysis with a sensitivity limit corresponding to nanometer-sized precipitates is possible, with full visual control of the area, when a parametric model for the spatial distribution of elements in the specimen can be defined.
引用
收藏
页码:181 / 190
页数:10
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