RESIDUAL STRESS IN SINGLE-CRYSTAL NICKEL FILMS

被引:25
作者
FREEDMAN, JF
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关键词
D O I
10.1147/rd.64.0449
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
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页码:449 / 455
页数:7
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