2-DIMENSIONAL MODEL OF GLOW-DISCHARGES FOR A CYLINDRICAL GEOMETRY

被引:12
作者
HASHIGUCHI, S
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1992年 / 10卷 / 04期
关键词
D O I
10.1116/1.578249
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A computer simulation of a dc glow discharge is presented. The simulation consists of a two-dimensional continuum model for electron and ion transport using the local field approximation. The continuity equations of electron and ion are coupled with Poisson's equation for a given set of boundary conditions. Potential values on insulator are determined by taking surface charges on it into account. Numerical calculations were made for 1 Torr helium glow discharges in a cylindrical discharge vessel with an electrode on each end. The current density I(c) ranged from 1 to 40-mu-A/cm2. The voltage-current curve has a minimum voltage at about I(c) = 4-mu-A/cm2. At higher values of I(c), a typical character of glow discharge was realized; peak ion density in front of the cathode and charge-neutrality region in front of the anode.
引用
收藏
页码:1339 / 1343
页数:5
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