ELLIPTIC MULTILAYER BRAGG-FRESNEL LENSES WITH SUBMICRON SPATIAL-RESOLUTION FOR X-RAYS

被引:45
作者
ERKO, A
AGAFONOV, Y
PANCHENKO, LA
YAKSHIN, A
CHEVALLIER, P
DHEZ, P
LEGRAND, F
机构
[1] UNIV PARIS 11,UTILISAT RAYONEMENT ELECTROMAGNET LAB,F-91405 ORSAY,FRANCE
[2] UNIV PARIS 11,SPECTROSCOPIE ATOM & ION LAB,F-91405 ORSAY,FRANCE
[3] UNIV PARIS 06,PHYS ATOM & NUCL LAB,F-75252 PARIS,FRANCE
关键词
D O I
10.1016/0030-4018(94)90311-5
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Elliptical Bragg-Fresnel multilayer lenses (BFML), designed and fabricated at the Institute of Microelectronic Technology (Russian Academy of Science) have been used for two-dimensional focusing of the white X-ray synchrotron beam at LURE (Orsay France). For two fixed beam energies (8 keV and 12.4 keV), the spot size produced was approximately 1 mum as determined from a high resolution photographic plate. A fluorescence X-ray scanning microprobe based on these BFML lenses was also tested. The transmitted signal registered during the scan of a test object shows less than 1 mum resolution with 8 keV output photon energy. 2D scanning images with submicron resolution of test objects in transmission mode at 8 keV and 12.4 keV beam energies are presented.
引用
收藏
页码:146 / 150
页数:5
相关论文
共 12 条
[1]  
Aristov V.V., 1991, XRAY OPTICS
[2]  
ARISTOV VV, 1986, JETP LETT+, V44, P265
[3]  
ARISTOV VV, 1987, PISMA ZH TEKH FIZ+, V13, P114
[4]  
ARISTOV VV, 1990, C P 1, V25, P275
[5]  
CHEVALLIER P, 1992, XRAY MICROSCOPY, V3, P391
[6]  
DHEZ P, 1992, APPL OPTICS, V31, P6664
[7]  
Erko A I, 1990, J Xray Sci Technol, V2, P297, DOI 10.3233/XST-1990-2405
[8]  
ERKO AI, 1992, I PHYS C SER, V130, P617
[9]   PHASE ZONE PLATES FOR X-RAYS AND EXTREME UV [J].
KIRZ, J .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (03) :301-309
[10]  
Michette A. G., 1986, OPTICAL SYSTEMS SOFT