QUANTIFICATION OF SPHERICAL INCLUSIONS IN THE SCANNING ELECTRON-MICROSCOPE USING MONTE-CARLO SIMULATIONS

被引:47
作者
GAUVIN, R
HOVINGTON, P
DROUIN, D
机构
[1] Département de Génie Mécanique, Université de Sherbrooke, Sherbrooke, Québec
关键词
INCLUSIONS; X-RAY MICROANALYSIS; MONTE CARLO; ELECTRON BACKSCATTERING; IMAGE GENERATION;
D O I
10.1002/sca.4950170401
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Quantitative x-ray analysis of spherical inclusions embedded in a matrix is not possible using the classical ZAF and phi(rho)Z methods based on specimens of homogeneous composition. Gauvin et al. (1992) have demonstrated that Monte Carlo simulations can be used to perform quantitative analysis of spherical inclusions of homogeneous composition. In this paper, this method is extended to obtain an analytical expression to perform such quantification. Also, Monte Carlo simulations are used to simulate x-ray and electron backscattering images of spherical inclusions in order to improve our understanding of contrast mechanism.
引用
收藏
页码:202 / 219
页数:18
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