A PLASMA REACTOR BASED ON THE FORCED CONSTRICTED TYPE DC PLASMA-JET AND ITS APPLICATION TO THERMAL PLASMA PROCESSING IN LOW-PRESSURE

被引：16

作者：

SAKIYAMA, S

HIRABARU, T

FUKUMASA, O

机构：

[1] Department of Electrical and Electronic Engineering, Faculty of Engineering, Yamaguchi University, Ube 755

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 04期

关键词：

D O I：

10.1063/1.1142945

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A reactor consisting of a forced constricted type dc plasma jet generator and a feed ring has been developed. In order to demonstrate the application feasibility of this reactor to low pressure plasma processing, the characteristics of the forced constricted arc in low pressure, and production of ultrafine particles of refractory materials (Al2O3, ZrC, TiC) are studied.

引用

页码：2408 / 2410

页数：3