FLUORINATION OF THE DIMERIZED SI(100) SURFACE STUDIED BY MOLECULAR-DYNAMICS SIMULATION

被引：115

作者：

STILLINGER, FH

WEBER, TA

机构：

来源：

PHYSICAL REVIEW LETTERS | 1989年 / 62卷 / 18期

关键词：

D O I：

10.1103/PhysRevLett.62.2144

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：2144 / 2147

页数：4

相关论文

共 16 条

[1] PHASE-DIAGRAM OF SILICON BY MOLECULAR-DYNAMICS
BROUGHTON, JQ
LI, XP
[J]. PHYSICAL REVIEW B, 1987, 35 (17) : 9120 - 9127
[2] Gear C. W., 1971, NUMERICAL INITIAL VA
[3] SYNCHROTRON PHOTOEMISSION INVESTIGATION OF THE INITIAL-STAGES OF FLUORINE ATTACK ON SI SURFACES - RELATIVE ABUNDANCE OF FLUOROSILYL SPECIES
MCFEELY, FR
MORAR, JF
SHINN, ND
LANDGREN, G
HIMPSEL, FJ
[J]. PHYSICAL REVIEW B, 1984, 30 (02): : 764 - 770
[4] MOLECULAR-DYNAMICS SIMULATION FOR CHEMICALLY REACTIVE SUBSTANCES - FLUORINE
STILLINGER, FH
WEBER, TA
[J]. JOURNAL OF CHEMICAL PHYSICS, 1988, 88 (08) : 5123 - 5133
[5] MOLECULAR-DYNAMICS STUDY OF CHEMICAL-REACTIVITY IN LIQUID SULFUR
STILLINGER, FH
WEBER, TA
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1987, 91 (19) : 4899 - 4907
[6] COMPUTER-SIMULATION OF LOCAL ORDER IN CONDENSED PHASES OF SILICON
STILLINGER, FH
WEBER, TA
[J]. PHYSICAL REVIEW B, 1985, 31 (08): : 5262 - 5271
[7] DYNAMICS OF STRUCTURAL TRANSITIONS IN LIQUIDS
STILLINGER, FH
WEBER, TA
[J]. PHYSICAL REVIEW A, 1983, 28 (04): : 2408 - 2416
[8] HIDDEN STRUCTURE IN LIQUIDS
STILLINGER, FH
WEBER, TA
[J]. PHYSICAL REVIEW A, 1982, 25 (02): : 978 - 989
[9] MOLECULAR-DYNAMICS OF SURFACE-DIFFUSION .1. MOTION OF ADATOMS AND CLUSTERS
TULLY, JC
GILMER, GH
SHUGARD, M
[J]. JOURNAL OF CHEMICAL PHYSICS, 1979, 71 (04) : 1630 - 1642
[10] ATOMIC AND MOLECULAR-SCATTERING AT SURFACES
TULLY, JC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02): : 427 - 428