A MECHANISM FOR GROWTH ON DIAMOND (110) FROM ACETYLENE

We have proposed a detailed chemical kinetics mechanism for the addition of C2H2 to a (110) diamond surface, which is the fastest growing face. The model contains no adjustable parameters and is based on the hypothesis that diamond surface chemistry may be understood in analogy with gas-phase hydrocarbon chemistry. We calculated a growth rate of 0.03-mu-m/h, which gives order-of-magnitude agreement with experiments and suggests we have a feasible mechanism for growth on (110) surfaces.