PREPARATION OF ALLOY DEPOSITS BY CONTINUOUS ELECTRON-BEAM EVAPORATION FROM A SINGLE ROD-FED SOURCE

被引:18
作者
NIMMAGADDA, R
BUNSHAH, RF
RAGHURAM, AC
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 06期
关键词
D O I
10.1116/1.1317050
中图分类号
O59 [应用物理学];
学科分类号
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页码:1406 / +
页数:1
相关论文
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