TEMPERATURE-CONTROLLED KELVIN MICROPROBE

被引：14

作者：

ZHANG, TH

PETELENZ, D

JANATA, J

机构：

[1] Department of Materials Science and Engineering, University of Utah, Salt Lake City

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1993年 / 12卷 / 03期

关键词：

D O I：

10.1016/0925-4005(93)80016-5

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

An insulated-gate field-effect transistor with the metal gate suspended 1-2 mum above the solid insulator is a miniature equivalent of a Kelvin probe. The suspended gate is a thin layer of platinum, which is mechanically supported by a layer of polyimide several micrometers thick. In addition to being the gate electrode, the platinum film serves as a resistive thermometer and a heater. Bypassing a constant current through it, it is possible to heat the bridge up to 400-degrees-C. This heating has only a negligible effect on the transistor characteristics of the structure below it. The new device can be used as a tool to study electrochemically deposited layers and as a chemical microsensor.

引用

页码：175 / 180

页数：6

共 15 条

[1] MICRO KELVIN PROBE FOR LOCAL WORK-FUNCTION MEASUREMENTS [J].