BRILLOUIN-SCATTERING BY SURFACE ACOUSTIC MODES FOR ELASTIC CHARACTERIZATION OF ZNO FILMS

被引:37
作者
CARLOTTI, G [1 ]
FIORETTO, D [1 ]
PALMIERI, L [1 ]
SOCINO, G [1 ]
VERDINI, L [1 ]
VERONA, E [1 ]
机构
[1] UNIV LAQUILA, SCH CONDENSED MATTER PHYS, I-67100 LAQUILA, ITALY
关键词
D O I
10.1109/58.67835
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
Brillouin scattering from surface phonons has been used for determining the dispersion curves of guided acoustic modes propagating along piezoelectric ZnO films. Measurements were performed on films of different thicknesses in the range between 20 and 320 nm, deposited by RF magnetron sputtering on Si and SiO2 substrates. Brillouin spectra from Rayleigh acoustic modes were taken in the back-scattering geometry at different incidence angles between 30 and 70 degrees. The experimental data for the ZnO/Si films fit the expected theoretical dispersion curves fairly well for film thickness greater than 150 nm, while they appreciably depart from the same curves for smaller thickness. This behavior has been interpreted in terms of a reduction of the effective elastic constants of the film in a layer near the interface, due to the lattice misfit between the film and the substrate. This effect was not observed in the case of ZnO films deposited on fused quartz substrates.
引用
收藏
页码:56 / 61
页数:6
相关论文
共 21 条
  • [1] SURFACE BRILLOUIN-SCATTERING IN POLYCRYSTALLINE GOLD
    BASSOLI, L
    NIZZOLI, F
    SANDERCOCK, JR
    [J]. PHYSICAL REVIEW B, 1986, 34 (02): : 1296 - 1299
  • [2] LOCALIZED PHONON MODES IN FE-PD MULTILAYER STRUCTURES
    BAUMGART, P
    HILLEBRANDS, B
    MOCK, R
    GUNTHERODT, G
    BOUFELFEL, A
    FALCO, CM
    [J]. PHYSICAL REVIEW B, 1986, 34 (12): : 9004 - 9007
  • [3] ELASTIC-CONSTANTS OF MO/TA SUPERLATTICES MEASURED BY BRILLOUIN-SCATTERING
    BELL, JA
    BENNETT, WR
    ZANONI, R
    STEGEMAN, GI
    FALCO, CM
    NIZZOLI, F
    [J]. PHYSICAL REVIEW B, 1987, 35 (08): : 4127 - 4130
  • [4] STRONG INTERFERENCE EFFECTS IN SURFACE BRILLOUIN-SCATTERING FROM A SUPPORTED TRANSPARENT FILM
    BORTOLANI, V
    NIZZOLI, F
    SANTORO, G
    SANDERCOCK, JR
    [J]. PHYSICAL REVIEW B, 1982, 25 (05): : 3442 - 3445
  • [5] THEORY OF BRILLOUIN-SCATTERING FROM SURFACE ACOUSTIC PHONONS IN SUPPORTED FILMS
    BORTOLANI, V
    MARVIN, AM
    NIZZOLI, F
    SANTORO, G
    [J]. JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1983, 16 (09): : 1757 - 1776
  • [6] INVESTIGATION OF ELASTIC PROPERTIES OF ZNO FILMS BY BRILLOUIN-SCATTERING
    CARLOTTI, G
    SOCINO, G
    VERONA, E
    [J]. JOURNAL OF APPLIED PHYSICS, 1989, 65 (03) : 1370 - 1372
  • [7] ACOUSTIC INVESTIGATION OF THE ELASTIC PROPERTIES OF ZNO FILMS
    CARLOTTI, G
    SOCINO, G
    PETRI, A
    VERONA, E
    [J]. APPLIED PHYSICS LETTERS, 1987, 51 (23) : 1889 - 1891
  • [8] Farnell G., 1972, EDS, V9, P35, DOI [10.1016/B978-0-12-395670-5.50007-6, DOI 10.1016/B978-0-12-395670-5.50007-6]
  • [9] HELLWEGE KH, 1979, NUMERICAL DATA FUNCT, V11, P45
  • [10] Hickernell F. S., 1984, IEEE 1984 Ultrasonics Symposium Proceedings (Cat. No. 84CH2112-1), P253, DOI 10.1109/ULTSYM.1984.198300