SPACE-TIME RESOLVED KINETICS OF MIXED RARE-GAS-ATTACHING GAS PLASMAS

被引：10

作者：

GOTTSCHO, RA

SCHELLER, GR

INTRATOR, T

GRAVES, DB

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575711

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1393 / 1396

页数：4

共 23 条

[1] INELASTIC-SCATTERING OF LOW-ENERGY ELECTRONS BY METASTABLE ATOMS [J].

ANDREEV, EA ;

BODROV, AE .

CHEMICAL PHYSICS LETTERS, 1984, 109 (05) :450-455

[2]

BARANOV IY, 1981, OPT SPEKTROSK+, V51, P571

[3] EXCITATION OF METASTABLE ARGON AND HELIUM-ATOMS BY ELECTRON-IMPACT [J].

BORST, WL .

PHYSICAL REVIEW A, 1974, 9 (03) :1195-1200

[4] DEEXCITATION OF AR-P-3(2),P-3(1), AND P-1(1) STATES IN PURE ARGON AND IN AR-H2 OR AR-CO MIXTURES [J].

BOURENE, M ;

DUTUIT, O ;

LECALVE, J .

JOURNAL OF CHEMICAL PHYSICS, 1975, 63 (04) :1668-1675

[5]

BURTON RH, 1984, DRY ETCHING MICROELE

[6]

Coburn J.W., 1982, PLASMA CHEM PLASMA P, V2, P1, DOI 10.1007/BF00566856

[7]

Flamm D.L., 1981, PLASMA CHEM PLASMA P, V1, P317, DOI [10.1007/bf00565992, DOI 10.1007/BF00565992]

[8] FREQUENCY-EFFECTS IN PLASMA-ETCHING [J].

FLAMM, DL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :729-738

[9]

Flamm DL, 1981, PLASMA CHEM PLASMA P, V1, P37, DOI DOI 10.1007/BF00566374

[10]

Gerasimov G. N., 1977, Optics and Spectroscopy, V43, P7

← 1 2 3 →