LATERAL FORCE CURVE FOR ATOMIC-FORCE LATERAL FORCE MICROSCOPE CALIBRATION

被引：33

作者：

FUJISAWA, S

KISHI, E

SUGAWARA, Y

MORITA, S

机构：

[1] Department of Physics, Faculty of Science, Hiroshima University, Higashi-Hiroshima 724

来源：

APPLIED PHYSICS LETTERS | 1995年 / 66卷 / 04期

关键词：

D O I：

10.1063/1.114078

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this letter, a method to calibrate sensitivity for the three-dimensional displacement of X, Y, and Z directions by using the novel force curve, namely lateral force curve, as well as vertical force curve in atomic force/lateral force microscope (AFM/LFM) measurement is described. Furthermore, from quantized friction measurement based on the two-dimensional stick-slip model, it is experimentally confirmed that this lateral force curve calibration is reasonable. © 1995 American Institute of Physics.

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页码：526 / 528

页数：3

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