PHOTOINDUCED MODIFICATION OF THE CATALYTIC REACTION OF TITANIUM-OXIDE AND PALLADIUM IN CHEMICAL-VAPOR-DEPOSITION OF AL FILMS

In chemical vapor deposition of Al thin films, using dimethylaluminum hydride, the catalytic reaction of titanium oxide was enhanced by irradiation of the UV light from a deuterium lamp. In contrast, the light suppressed nucleation on another catalytic Pd surface, which became pronounced at low temperatures. A 160-nm emission band of the deuterium lamp was more effective in the observed photoinduced effects than a 240-nm band. (C) 1994 American Institute of Physics.