AN ANALYSIS OF SYSTEMATIC PHASE ERRORS DUE TO NONLINEARITY IN FRINGE SCANNING SYSTEMS

被引:7
作者
OHYAMA, N
SHIMANO, T
TSUJIUCHI, J
HONDA, T
机构
关键词
D O I
10.1016/0030-4018(86)90437-2
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:223 / 225
页数:3
相关论文
共 5 条
[1]   DIGITAL WAVEFRONT MEASURING INTERFEROMETER FOR TESTING OPTICAL SURFACES AND LENSES [J].
BRUNING, JH ;
HERRIOTT, DR ;
GALLAGHER, JE ;
ROSENFELD, DP ;
WHITE, AD ;
BRANGACCIO, DJ .
APPLIED OPTICS, 1974, 13 (11) :2693-2703
[2]   PHASE-SHIFTER CALIBRATION IN PHASE-SHIFTING INTERFEROMETRY [J].
CHENG, YY ;
WYANT, JC .
APPLIED OPTICS, 1985, 24 (18) :3049-3052
[3]   DIGITAL WAVE-FRONT MEASURING INTERFEROMETRY - SOME SYSTEMATIC-ERROR SOURCES [J].
SCHWIDER, J ;
BUROW, R ;
ELSSNER, KE ;
GRZANNA, J ;
SPOLACZYK, R ;
MERKEL, K .
APPLIED OPTICS, 1983, 22 (21) :3421-3432
[4]   REAL-TIME INTERFEROMETER [J].
STUMPF, KD .
OPTICAL ENGINEERING, 1979, 18 (06) :648-653
[5]   FRINGE SCANNING RONCHI TEST FOR ASPHERICAL SURFACES [J].
YATAGAI, T .
APPLIED OPTICS, 1984, 23 (20) :3676-3679