FEMTOSECOND GAIN CHARACTERISTICS OF THE DISCHARGE-PUMPED ARF EXCIMER AMPLIFIER

被引：12

作者：

MOSSAVI, K

HOFMANN, T

SZABO, G

TITTEL, FK

机构：

[1] Department of Electrical and Computer Engineering, Rice Quantum Institute, Rice University, Houston, TX, 77251

来源：

OPTICS LETTERS | 1993年 / 18卷 / 06期

关键词：

D O I：

10.1364/OL.18.000435

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The gain characteristics of a discharge-pumped ArF excimer amplifier are measured with approximately 700-fs-long pulses. The small-signal gain and saturation energy are found to be 0.17 cm-1 and 3.65 +/- 0.15 mJ/cm2, respectively. The maximum output energy density extracted from the deeply saturated amplifier is as much as 10 mJ/cm2. The demonstrated femtosecond gain characteristics of ArF indicate that, by utilizing sufficiently high seed pulse energies, the ArF excimer laser is expected to show a performance similar to a femtosecond high-brightness KrF excimer laser system.

引用

页码：435 / 437

页数：3

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