GAINAS/GAAS QUANTUM-WIRE LASER STRUCTURES WITH STRONG GAIN COUPLING DEFINED BY REACTIVE ION ETCHING

被引:11
作者
ORTH, A
ZULL, H
REITHMAIER, JP
FORCHEL, A
机构
[1] Technische Physik, Universität Würzburg, D-97074 Würzburg, Am Hubland
关键词
SEMICONDUCTOR JUNCTION LASERS; SEMICONDUCTOR QUANTUM WIRES; REACTIVE ION ETCHING;
D O I
10.1049/el:19950343
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Gain-coupled GaInAs/GaAs quantum wire lasers have been realised with wire widths down to 70nm by low-damage dry etching. Very strong gain modulation has been achieved by etching through the active layers. The optically pumped laser structures show singlemode operation at 77K.
引用
收藏
页码:457 / 458
页数:2
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