THE INTERACTION OF TIN OXIDE-FILMS WITH O2, H-2, NO, AND H2S

被引:73
作者
CAPEHART, TW [1 ]
CHANG, SC [1 ]
机构
[1] GM CORP,RES LABS,DEPT ELECTR,WARREN,MI 48090
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期
关键词
D O I
10.1116/1.570794
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:393 / 397
页数:5
相关论文
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