CALIBRATION OF SPUTTERING YIELDS FOR AES DEPTH PROFILING OF OXIDE LAYERS ON ALUMINUM BY MEANS OF CARRIER-GAS HEAT EXTRACTION ANALYSIS

被引：9

作者：

CHEN, TF

GARTEN, RPH

GRALLATH, E

BUBERT, H

JENETT, H

机构：

[1] MAX PLANCK INST MET FORSCH STUTTGART,REINSTSTOFFANALYT LAB,BUNSEN KIRCHHOFF STR 13,D-4600 DORTMUND 1,FED REP GER

[2] INST SPEKTROCHEM & ANGEW SPEKT,D-4600 DORTMUND 1,FED REP GER

来源：

FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE | 1987年 / 329卷 / 2-3期

关键词：

D O I：

10.1007/BF00469133

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：174 / 179

页数：6

共 47 条

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