SCANNING ELECTRON-MICROSCOPIC TECHNIQUE FOR IMAGING A DIAMOND TOOL EDGE

被引：23

作者：

DRESCHER, J

机构：

[1] Precision Engineering Center, North Carolina State University, Raleigh, NC

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1993年 / 15卷 / 02期

关键词：

SCANNING ELECTRON MICROSCOPE; DIAMOND TOOL EDGE;

D O I：

10.1016/0141-6359(93)90346-C

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A technique is described to measure the edge radius of diamond cutting tools using the scanning electron microscope (SEM). This method attempts to overcome two major limitations of the SEM in this application: low image contrast and lack of quantitative topographic information. A line of electron beam contamination, viewed at an angle, provides improved contrast for focusing and a means of obtaining the tool profile from the geometry.

引用

页码：112 / 114

页数：3

共 4 条

[1]

Asai, Kobayashi, Observations of chip producing behaviour in ultra-precision diamond machining and study on mirror-like surface generating mechanism, Prec Eng, 12, pp. 137-143, (1990)

[2]

Evans, Polvani, Postek, Rhorer, Some observations on tool sharpness and sub-surface damage in single point diamond turning, SPIE, 802, pp. 52-66, (1987)

[3]

Asai, Taguchi, Horio, Kasai, Measuring the very small cutting-edge radius for a diamond tool using a new kind of SEM having two detectors, Trans CIRP, 39, pp. 85-88, (1990)

[4]

Zhou, Ximen, Mooney, Russell, Tip fabrication techniques for scanning probe microscopy, NCSU Precision Engineering Center 1991 Annual Report, 9, pp. 17-51, (1991)

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