ALUMINA FILMS BY SPUTTER DEPOSITION WITH AR/O2 - PREPARATION AND CHARACTERIZATION

被引：48

作者：

BHATIA, CS

GUTHMILLER, G

SPOOL, AM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576273

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1298 / 1302

页数：5

共 15 条

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