TWO-DIMENSIONAL ELECTROMAGNETIC-FIELD EFFECTS IN INDUCTION PLASMA MODELING

被引：166

作者：

MOSTAGHIMI, J

BOULOS, MI

机构：

来源：

关键词：

D O I：

10.1007/BF01015825

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：25 / 44

页数：20

共 22 条

[1] THE INDUCTIVELY COUPLED RF (RADIO-FREQUENCY) PLASMA [J].

BOULOS, MI .

[2]

BOULOS MI, 1987, INDUCTIVELY COUPLE 2, P289

[3] TRANSPORT PROPERTIES OF IONIZED MONATOMIC GASES [J].

DEVOTO, RS .

[4]

DRESVIN SV, 1977, PHYSICS TECHNOLOGY L, P329

EVANS, DL ;

TANKIN, RS .

[6]

Jackson JD, 1962, CLASSICAL ELECTRODYN

[7]

JACKSON JD, 1987, CLASSICAL ELECTROD 2

[8]

Korn G. A., 1968, MATH HDB SCI ENG

[9]

Kruger CH., 1973, PARTIALLY IONIZED GA

[10]

LEWIS JL, 1971, THESIS MCGILL U