FT-IR CHARACTERIZATION OF SILICON-NITRIDE SI3N4 AND SILICON OXYNITRIDE SI2ON2 SURFACES

[1] Boehm HP, 1983, CATALYSIS SCI TECHNO, P39, DOI DOI 10.1007/978-3-642-93229-8_2

[2] INFRARED STUDY OF LOW-TEMPERATURE ADSORPTION .1. CO ON AEROSIL - INTERPRETATION OF THE HYDRATED SILICA SPECTRUM [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1979, 83 (22) : 2863 - 2869

[3] INFRARED CHARACTERIZATION OF ALPHA-CRYSTALLINE AND BETA-CRYSTALLINE SILICON-NITRIDE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (07) : 1560 - 1562

[4] MARCHAND R, 1970, REV CHIM MINER, V7, P87

[5] PAUKSHTIS EA, 1979, REACT KINET CATAL LE, V12, P325

[6] INFRARED STUDY OF OH AND NH2 GROUPS ON SURFACE OF A DRY SILICA AEROGEL [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1966, 70 (09) : 2937 - &

[7] SORLINO M, 1985, ANN CHIM-SCI MAT, V10, P105

[1] Boehm HP, 1983, CATALYSIS SCI TECHNO, P39, DOI DOI 10.1007/978-3-642-93229-8_2

[2] INFRARED STUDY OF LOW-TEMPERATURE ADSORPTION .1. CO ON AEROSIL - INTERPRETATION OF THE HYDRATED SILICA SPECTRUM [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1979, 83 (22) : 2863 - 2869

[3] INFRARED CHARACTERIZATION OF ALPHA-CRYSTALLINE AND BETA-CRYSTALLINE SILICON-NITRIDE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (07) : 1560 - 1562

[4] MARCHAND R, 1970, REV CHIM MINER, V7, P87

[5] PAUKSHTIS EA, 1979, REACT KINET CATAL LE, V12, P325

[6] INFRARED STUDY OF OH AND NH2 GROUPS ON SURFACE OF A DRY SILICA AEROGEL [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1966, 70 (09) : 2937 - &

[7] SORLINO M, 1985, ANN CHIM-SCI MAT, V10, P105