VIBRATING SILICON DIAPHRAGM MICROMECHANICAL GYROSCOPE

被引：5

作者：

HARRIS, AJ ^{[1
]}

BURDESS, JS ^{[1
]}

WOOD, D ^{[1
]}

CRUICKSHANK, J ^{[1
]}

COOPER, G ^{[1
]}

机构：

[1] UNIV DURHAM,DURHAM DH1 3LE,ENGLAND

来源：

ELECTRONICS LETTERS | 1995年 / 31卷 / 18期

关键词：

ELECTRIC SENSING DEVICES; MICROMACHINING; MICROMECHANICAL RESONATORS;

D O I：

10.1049/el:19951070

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The design and operation of a micromechanical gyroscope based on a vibrating diaphragm loaded with an inertial mass is described. Capacitive actuation and sensing methods are employed. Preliminary results are presented which show that mechanical and electrical coupling limit current performance, which could be improved to give a noise equivalent rate of turn better than 0.14 degrees/s.

引用

页码：1567 / 1568

页数：2