DOPING CONCENTRATIONS OF INDIUM-DOPED SILICON MEASURED BY HALL, C-V, AND JUNCTION-BREAKDOWN TECHNIQUES

被引:36
作者
SCHRODER, DK
BRAGGINS, TT
HOBGOOD, HM
机构
关键词
D O I
10.1063/1.324424
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:5256 / 5259
页数:4
相关论文
共 13 条
[1]   NEW ACCEPTOR LEVEL IN INDIUM-DOPED SILICON [J].
BARON, R ;
YOUNG, MH ;
NEELAND, JK ;
MARSH, OJ .
APPLIED PHYSICS LETTERS, 1977, 30 (11) :594-596
[2]   OBSERVATION OF IMPURITY REDUSTRIBUTION DURING THERMAL OXIDATION OF SILICON USING MOS STRUCTURE [J].
DEAL, BE ;
GROVE, AS ;
SNOW, EH ;
SAH, CT .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (03) :308-&
[3]   DOPANT DIFFUSION IN SILICON .3. ACCEPTORS [J].
GHOSHTAG.RN .
PHYSICAL REVIEW B-SOLID STATE, 1971, 3 (08) :2507-&
[4]  
HILIBRAND J, 1960, RCA REV, V21, P245
[5]   RESISTIVITY OF BULK SILICON AND OF DIFFUSED LAYERS IN SILICON [J].
IRVIN, JC .
BELL SYSTEM TECHNICAL JOURNAL, 1962, 41 (02) :387-+
[6]   AVALANCHE BREAKDOWN CALCULATIONS FOR A PLANAR P-N JUNCTION [J].
KENNEDY, DP ;
OBRIEN, RR .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1966, 10 (03) :213-&
[7]   ON MEASUREMENT OF IMPURITY ATOM DISTRIBUTIONS BY DIFFERENTIAL CAPACITANCE TECHNIQUE [J].
KENNEDY, DP ;
OBRIEN, RR .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1969, 13 (02) :212-&
[8]   ON MEASUREMENT OF IMPURITY ATOM DISTRIBUTIONS IN SILICON BY DIFFERENTIAL CAPACITANCE TECHNIQUE [J].
KENNEDY, DP ;
MURLEY, PC ;
KLEINFELDER, W .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1968, 12 (05) :399-+
[9]   EFFECTS OF DEEP IMPURITIES ON N+P JUNCTION REVERSE-BIASED SMALL-SIGNAL CAPACITANCE [J].
SCHIBLI, E ;
MILNES, AG .
SOLID-STATE ELECTRONICS, 1968, 11 (03) :323-+
[10]   RESISTIVITY AND DEEP IMPURITY LEVELS IN SILICON AT 300 K [J].
SCLAR, N .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (06) :709-712