EFFECTS OF OXYGEN ON PROPERTIES OF RF SPUTTERED NIFE FILMS

[1] 7ICROANALYSIS BY DIRECT OBSERVATION OF NUCLEAR REACTIONS USING A 2 MEV VAN-DE-GRAAFF [J]. NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04): : 481 - &

[2] ARGYLE BE, 1975, 20TH ANN C AIP SAN F, P564

[3] AMORPHOUS MATERIALS FOR MICROMETER AND SUBMICROMETER BUBBLE-DOMAIN TECHNOLOGY [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1976, 20 (03) : 271 - 281

[4] Chu W.K., 1978, BACKSCATTERING SPECT, V1st ed., DOI 10.1016/B978-0-12-173850-1.50008-9

[5] CUOMO JJ, 1977, J VAC SCI TECHNOL, V14, P152, DOI 10.1116/1.569109

[6] INFLUENCE OF BIAS ON DEPOSITION OF METALLIC-FILMS IN RF AND DC SPUTTERING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 34 - 40

[7] INVESTIGATION OF EFFECT OF O2 N2 AND H2O ON NICKEL THIN FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (3P2) : 964 - &

[8] HO PS, 1976, 29 AIP C P, P39

[9] MAISSEL LI, 1970, HDB THIN FILM TECHNO, pCH4

[10] NESBITT A, 1965, J APPL PHYSICS, V36, P1235

[1] 7ICROANALYSIS BY DIRECT OBSERVATION OF NUCLEAR REACTIONS USING A 2 MEV VAN-DE-GRAAFF [J]. NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04): : 481 - &

[2] ARGYLE BE, 1975, 20TH ANN C AIP SAN F, P564

[3] AMORPHOUS MATERIALS FOR MICROMETER AND SUBMICROMETER BUBBLE-DOMAIN TECHNOLOGY [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1976, 20 (03) : 271 - 281

[4] Chu W.K., 1978, BACKSCATTERING SPECT, V1st ed., DOI 10.1016/B978-0-12-173850-1.50008-9

[5] CUOMO JJ, 1977, J VAC SCI TECHNOL, V14, P152, DOI 10.1116/1.569109

[6] INFLUENCE OF BIAS ON DEPOSITION OF METALLIC-FILMS IN RF AND DC SPUTTERING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 34 - 40

[7] INVESTIGATION OF EFFECT OF O2 N2 AND H2O ON NICKEL THIN FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (3P2) : 964 - &

[8] HO PS, 1976, 29 AIP C P, P39

[9] MAISSEL LI, 1970, HDB THIN FILM TECHNO, pCH4

[10] NESBITT A, 1965, J APPL PHYSICS, V36, P1235