THERMODYNAMIC APPROACH TO STUDY OF CONDITIONS FOR CHEMICAL DEPOSITION OF BORON IN GAS-PHASE ONTO INERT SUBSTRATE

被引：7

作者：

THEBAULT, J ^{[1
]}

NASLAIN, R ^{[1
]}

HAGENMULLER, P ^{[1
]}

BERNARD, C ^{[1
]}

机构：

[1] UNIV GRENOBLE,CTR INFORMAT THERMODYNAM CHIM MINERALE,CNRS,F-38041 GRENOBLE,FRANCE

来源：

JOURNAL OF THE LESS-COMMON METALS | 1978年 / 58卷 / 01期

关键词：

D O I：

10.1016/0022-5088(78)90066-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：7 / 29

页数：23

共 38 条

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PLOOG, K .

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[2]

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[3]

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[4] DETERMINATION OF COMPLEX CHEMICAL-EQUILIBRIA IN POLYPHASE SYSTEMS .1. METHOD OF TREATMENT [J].

BERNARD, C ;

DENIEL, Y ;

JACQUOT, A ;

VAY, P ;

DUCARROIR, M .

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[5]

BOIRET M, 1969, THESIS U BORDEAUX

[6]

BONETTI R, 1975, 5TH P INT C CHEM VAP, P495

[7]

CARLTON HE, 1970, 2ND P INT C CHEM VAP, P209

[8]

CUEILLERON J, 1968, B SOC CHIM FR, V9, P3579

[9] DETERMINATION OF COMPLEX CHEMICAL-EQUILIBRIA IN POLYPHASE SYSTEMS .2. APPLICATION TO CALCULATION OF DOMAINS OF DEPOSITION STARTING WITH VAPOR-PHASE OF SYSTEM TI-C-H-CL [J].

DUCARROIR, M ;

JAYMES, M ;

BERNARD, C ;

DENIEL, Y .

JOURNAL OF THE LESS-COMMON METALS, 1975, 40 (02) :173-183

[10]

GRUBER PE, 1970, 2ND P INT C CHEM VAP, P25

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