ELECTRICAL CHARACTERISTICS OF (100), (111), AND RANDOMLY ALIGNED LEAD-ZIRCONATE-TITANATE THIN-FILMS

(100), (111), and randomly aligned lead zirconate titanate thin films on Pt/Ti/Corning 7059 glass substrates were prepared using a sol-gel method. The thin films, having different alignments, were fabricated by different drying conditions for pyrolysis. The hysteresis loop and the capacitance-voltage characteristics were investigated using a standardized ferroelectric test system. The dielectric constant and the current-voltage characteristics of the films were investigated using an impedance analyzer and a pA meter, respectively. The microstructure was investigated using scanning electron microscopy. The (100) aligned film showed a relatively larger dielectric constant than the (111) and the randomly aligned films. The films aligned in particular directions showed higher hysteresis parameters than the randomly aligned film. The leakage current densities of the films aligned in particular directions were lower than that of the randomly aligned film. © 1994 American Institute of Physics.