SURFACE SPECTROSCOPIC AND MOLECULAR-BEAM STUDIES OF THE REACTIONS OF TRIMETHYLALUMINUM ON SI(100)

被引:3
作者
WEE, A [1 ]
JACKMAN, RB [1 ]
PRICE, RJ [1 ]
FOORD, JS [1 ]
机构
[1] UNIV OXFORD, S PARKS RD, OXFORD OX1 3QR, ENGLAND
关键词
D O I
10.1088/0953-8984/1/SB/025
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
引用
收藏
页码:SB145 / SB148
页数:4
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BOUREE JE, 1975, BEAM INDUCED CHEM PR
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Sze S.M., 1983, VLSI TECHNOLOGY, V2nd