3RD HARMONIC-GENERATION AS A STRUCTURAL PROBE OF ION-IMPLANTED SILICON

被引：8

作者：

FOX, EC ^{[1
]}

VANDRIEL, HM ^{[1
]}

机构：

[1] UNIV TORONTO,ONTARIO LASER & LIGHTWAVE RES CTR,TORONTO M5S 1A7,ONTARIO,CANADA

来源：

IEEE JOURNAL OF QUANTUM ELECTRONICS | 1989年 / 25卷 / 05期

关键词：

D O I：

10.1109/3.28006

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1104 / 1111

页数：8

共 19 条

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