ELECTRON-MOBILITY IN INVERSION AND ACCUMULATION LAYERS ON THERMALLY OXIDIZED SILICON SURFACES

被引:81
作者
SUN, SC
PLUMMER, JD
机构
关键词
D O I
10.1109/JSSC.1980.1051439
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:562 / 573
页数:12
相关论文
共 39 条
[1]  
BERGER J, 1977 SEM INT SPEC C
[2]   CHARGE-SHEET MODEL OF MOSFET [J].
BREWS, JR .
SOLID-STATE ELECTRONICS, 1978, 21 (02) :345-355
[3]   CARRIER-DENSITY FLUCTUATIONS AND IGFET MOBILITY NEAR THRESHOLD [J].
BREWS, JR .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (05) :2193-2203
[4]   ROLE OF SCATTERING BY SURFACE-ROUGHNESS IN SILICON INVERSION LAYERS [J].
CHENG, YC ;
SULLIVAN, EA .
SURFACE SCIENCE, 1973, 34 (03) :717-731
[5]   RELATIVE IMPORTANCE OF PHONON SCATTERING TO CARRIER MOBILITY IN SI SURFACE-LAYER AT ROOM-TEMPERATURE [J].
CHENG, YC ;
SULLIVAN, EA .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (08) :3619-3625
[6]   EFFECT OF COULOMB SCATTERING ON SILICON SURFACE MOBILITY [J].
CHENG, YC ;
SULLIVAN, EA .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (01) :187-192
[7]  
CHENG YC, 1971, 3RD P C SOL STAT DEV, P173
[8]  
CLEMENS JT, COMMUNICATION
[9]   EFFECTS OF DIFFUSED IMPURITY PROFILE ON DC CHARACTERISTICS OF VMOS AND DMOS DEVICES [J].
DAVANZO, DC ;
COMBS, SR ;
DUTTON, RW .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1977, 12 (04) :356-362
[10]   OPTICAL ABSORPTION DUE TO SPACE-CHARGE-INDUCED LOCALIZED STATES [J].
DUKE, CB .
PHYSICAL REVIEW, 1967, 159 (03) :632-+