CHARACTERIZATION OF AMORPHOUS-SILICON FILMS BY RUTHERFORD BACKSCATTERING SPECTROMETRY

被引：16

作者：

KUBOTA, K

IMURA, T

IWAMI, M

HIRAKI, A

SATOU, M

FUJIMOTO, F

HAMAKAWA, Y

MINOMURA, S

TANAKA, K

机构：

[1] UNIV TOKYO,COLL GEN EDUC,TOKYO 153,JAPAN

[2] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN

[3] UNIV TOKYO,INST SOLID STATE PHYS,TOKYO 106,JAPAN

[4] ELECTROTECH LAB,TANASHI,TOKYO 188,JAPAN

[5] GOVT IND RES INST,IKEDA,OSAKA 563,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS | 1980年 / 168卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(80)91255-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：211 / 215

页数：5

共 17 条

[1] QUANTITATIVE-ANALYSIS OF HYDROGEN IN GLOW-DISCHARGE AMORPHOUS SILICON [J].

BRODSKY, MH ;

FRISCH, MA ;

ZIEGLER, JF ;

LANFORD, WA .

APPLIED PHYSICS LETTERS, 1977, 30 (11) :561-563

[2] SOLAR-CELLS USING DISCHARGE-PRODUCED AMORPHOUS SILICON [J].

CARLSON, DE ;

WRONSKI, CR .

JOURNAL OF ELECTRONIC MATERIALS, 1977, 6 (02) :95-106

[3] EFFECT OF HYDROGEN CONTENT ON THE PHOTO-VOLTAIC PROPERTIES OF AMORPHOUS SILICON [J].

CARLSON, DE ;

MAGEE, CW ;

TRIANO, AR .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (04) :688-691

[4] ENERGY-LOSS OF HE IONS IN SOLIDIFIED-GASES [J].

CHU, WK ;

BRAUN, M ;

DAVIES, JA ;

MATSUNAMI, N ;

THOMPSON, DA .

NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3) :115-120

[5] APPLICATION OF NUCLEAR-REACTIONS FOR QUANTITATIVE HYDROGEN ANALYSIS IN A VARIETY OF DIFFERENT MATERIALS PROBLEMS [J].

CLARK, GJ ;

WHITE, CW ;

ALLRED, DD ;

APPLETON, BR ;

KOCH, FB ;

MAGEE, CW .

NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3) :9-18

[6] INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON [J].

FREEMAN, EC ;

PAUL, W .

PHYSICAL REVIEW B, 1978, 18 (08) :4288-4300

[7]

FUJIMOTO F, UNPUBLISHED

[8]

IMURA T, UNPUBLISHED

[9]

OKAMOTO H, UNPUBLISHED

[10] INFLUENCE OF DEPOSITION CONDITIONS ON SPUTTER-DEPOSITED AMORPHOUS SILICON [J].

PAWLEWICZ, WT .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (11) :5595-5601

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