共 6 条
[1]
BOYD GD, 1979, 21ST EL MAT C BOULD
[2]
HERNDON TO, 1977, 1977 KOD MICR S MONT
[3]
Hosokawa N, 1974, JPN J APPL PHYS S, V13, P435
[4]
IIDA A, 1979, SHINGAKU GIHO, V79, P15
[5]
POULSEN RG, 1976, DEC P INT EL DEV M W, P205
[6]
REACTIVE ION ETCHING OF ALUMINUM AND ALUMINUM-ALLOYS IN AN RF PLASMA CONTAINING HALOGEN SPECIES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1978, 15 (02)
:334-337
SCHAIBLE, PM
;
METZGER, WC
;
ANDERSON, JP
.