ELECTRON-IMPACT DISSOCIATION OF METHANE INTO CH3 AND CH2 RADICALS .2. ABSOLUTE CROSS-SECTIONS

被引:73
作者
NAKANO, T
TOYODA, H
SUGAI, H
机构
[1] Department of Electrical Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 11A期
关键词
METHANE; NITROGEN; DISSOCIATION CROSS SECTION; THRESHOLD IONIZATION; ELECTRON METHANE COLLISION; METHYL RADICAL; METHYLENE RADICAL;
D O I
10.1143/JJAP.30.2912
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electron energy dependence of partial cross sections for dissociation of methane into CH3 and CH2 radicals has been reported in part I of this paper. In order to assign absolute values to these relative cross sections, two additional experiments were carried out. One was cross-section measurement for electron-impact nitrogen dissociation (N2 --> N + N, N + N+) using threshold-ionization mass spectrometry. The other was the measurement of sticking coefficients of CH3, CH2, and atomic nitrogen. According to these measurements, the absolute partial cross sections for neutral dissociation were determined: maximum cross section is 1.4 x 10(-20) m2 at 24 eV for CH3 radical and 0.72 x 10(-20) m2 at 18 eV for CH2 radical.
引用
收藏
页码:2912 / 2915
页数:4
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