ASPECTS OF FIELD-EMISSION FROM SILICON DIODE-ARRAYS

被引：35

作者：

HARVEY, RJ

LEE, RA

MILLER, AJ

WIGMORE, JK

机构：

[1] MARCONI DEF SYST LTD,STANMORE HA7 4LY,MIDDX,ENGLAND

[2] GEC LTD,HISRT RES CTR,WEMBLEY HA9 7PP,MIDDX,ENGLAND

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1991年 / 38卷 / 10期

关键词：

D O I：

10.1109/16.88519

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have studied the field emission of arrays of lithographically fabricated silicon tips both by electrical characterization and by direct imaging of the spatial emission pattern. Many samples give rise to Fowler-Nordheim plots which consist of two distinct regions with different slopes. A model of this behavior is proposed in terms of a random distribution of tip radii, truncated on the low side by melting or surface reconstruction. The model also explains why so few tips in an array actually contribute.

引用

页码：2323 / 2328

页数：6

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