METHOD OF MEASURING AND CONTROLLING EVAPORATION RATES DURING PRODUCTION OF THIN FILMS IN VACUUM

被引：20

作者：

SCHWARZ, H

机构：

来源：

关键词：

D O I：

10.1063/1.1717309

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：194 / &

共 15 条

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BAYARD, RT
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[5] DUSHMAN S, 1955, SFVT
[6] EVAPORATION RATE MONITOR
GIEDD, GR
PERKINS, MH
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1960, 31 (07) : 773 - 775
[7] A COMBINED CURRENT INDICATOR AND INTEGRATOR
HIGINBOTHAM, WA
RANKOWITZ, S
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1951, 22 (09) : 688 - 690
[8] HIGINBOTHAM WA, 1960, EDN, P24
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[10] KUBASCHEWSKI O, 1956, METALLURGICAL THERMO