CHROMIUM DEPOSITION FROM DICUMENE-CHROMIUM TO FORM METAL-SEMICONDUCTOR DEVICES

被引:14
作者
ANANTHA, NG
DOO, VY
SETO, DK
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D O I
10.1149/1.2407936
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:163 / +
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