PICOSECOND OPTICAL STUDIES OF AMORPHOUS DIAMOND AND DIAMOND-LIKE CARBON - THERMAL-CONDUCTIVITY AND LONGITUDINAL SOUND-VELOCITY

被引:120
作者
MORATH, CJ [1 ]
MARIS, HJ [1 ]
CUOMO, JJ [1 ]
PAPPAS, DL [1 ]
GRILL, A [1 ]
PATEL, VV [1 ]
DOYLE, JP [1 ]
SAENGER, KL [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1063/1.357560
中图分类号
O59 [应用物理学];
学科分类号
摘要
A picosecond pump-probe technique is used to measure the room-temperature thermal conductivity kappa and longitudinal sound velocity c(l) of amorphous diamond (a-D) and diamondlike carbon (DLC) thin films. Both kappa and c(l) were found to decrease with film hydrogen content. Depending on the film deposition technique, kappa is in the range 5-10 X 10(-2) W cm-1 K-1 for a-D, and 3-10 X 10(-3) W cm-1 K-1 for DLC. Values of c(l) were found to be in the range 14-18 X 10(5) cm s-1 for a-D, and 6-9 X 10(5) cm s-1 for DLC.
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页码:2636 / 2640
页数:5
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