CONSIDERATION OF THE CHEMICAL-REACTIVITY OF TRACE IMPURITIES PRESENT IN A GLOW-DISCHARGE

被引:35
作者
OHORODNIK, SK [1 ]
DEGENDT, S [1 ]
TONG, SL [1 ]
HARRISON, WW [1 ]
机构
[1] UNIV FLORIDA,DEPT CHEM,GAINESVILLE,FL 32611
关键词
GLOW DISCHARGE; MASS SPECTROMETRY; OPTICAL SPECTROMETRY; CRYOGENIC COOLING; PLASMA IMPURITY;
D O I
10.1039/ja9930800859
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Optical and mass spectrometric diagnostics were applied in a study of the chemical reactivity of the plasma impurity species in an r.f. glow discharge source. Copper, Fe and Ta metals and Ta powder-based compacted discs were chosen as test cathodes. A cryogenic coil incorporated within the discharge source was used in the investigations of the potential interactions. Significant increases were observed in the sputtering gas and cathode matrix ion signals, as well as the ground- and excited-state populations of these species with cryogenic cooling. The relative reactivities of the matrix-element species with water-related species in the plasma and the significance for glow discharge-based analytical techniques are discussed
引用
收藏
页码:859 / 865
页数:7
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